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Verified integrated Silicon Photonics 200mm and 300mm wafer probing solution for production-proven, optimized optical measurements right after installation. 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Perform fully autonomous, hands-free calibrations and measurements of RF and mm-Wave devices over multiple temperatures on 200mm and 300mm probe stations. load-pull modeling and characterization focus microwaves delta tuners RF mmW probe station probe system wafer test 150mm probe system 200mm probe system 200mm probe station 300mm probe system 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe system automated probe station automatic probe system automatic probe station semiautomated probe system semiautomated probe station semiautomatic probe system semiautomatic probe station semiconductor wafer probing Electrical probe station measuring equipment wafer prober machine microwave probe station prober electrical tester karl suss SUMMIT200 CM300xi CM300 Elite Elite300 FormFactor Cascade Microtech Contact Intelligence Technology Autonomous semiconductor test AttoGuard PureLine MicroChamber eVue Velox Autonomous rf VueTrack RF Device Test wafer handling wafer level test rf microwave rf measurement Device test Terahertz measurements mmW mmWave mm-Wave milimeterwave measurements milimeterwave test high frequency measurements high frequency test wafer probing temperature measuring device thermal chuck wafer level testing wafer electrical test rf calibration over temperature test unattended test over multiple temperatures wafer prober manufacturers Load pull Focus Microwaves Maury Microwave Keysight Technologies 0, 0 32, 22 64, 56 128, 128 192, 196 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 endstream endobj 1415 0 obj <>stream Adobed   #"&&&&&,,,,,,,,,,,,,,,,,,,,,#"&&&&&,,,,,,,,,,,,,,,,,,,,,P"   m!1AQ"a2Bq#R3CbDr$4Ss %&'()*56789:EFGHIJTUVWXYZcdefghijtuvwxyz{!12AQ"aq #$%&'()*3456789:BCDEFGHIJRSTUVWXYZbcdefghijrstuvwxyz ?zјz0ёf0шf0v\-( ۸H{ #* 6;wd>gNA.5L/˸WYI95$&a\TۍZև^m ۥ e*JuPxu)JEkh8Զʮ&ΤI`qqx\&_OxɂR̺! 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".*av]9PB<r;Jg2ĄpSJᤘºn (k̽:+9g Og9HqG endstream endobj 17 0 obj <>stream AA7FB58AB5A2923C1238B571881DD561 adobe:docid:photoshop:0d594827-8aff-0841-bc3b-142e64cb5b35 adobe:docid:photoshop:29b3ed44-ccf0-1b47-94f5-29ad8223c2ba adobe:docid:photoshop:554a56a2-d993-9940-9a0b-3574560a2a69 adobe:docid:photoshop:631b6574-0d20-4741-b074-0ee8580817e7 adobe:docid:photoshop:6b049a40-dde6-eb47-848f-8ae27d72eb5f adobe:docid:photoshop:b9aa9301-af48-11e7-8b7f-a11c78f4e98a adobe:docid:photoshop:ba7ee6ba-5a47-9642-b187-fb0bd98a3172 adobe:docid:photoshop:c02f73b5-38c0-3440-aa9b-2689ac5658c1 adobe:docid:photoshop:c0dd40a1-ae88-11e7-9e7a-df59bd2ea57f adobe:docid:photoshop:c4887bc4-b009-11e7-bef8-9ce874433c5c adobe:docid:photoshop:d7e4d2f2-9d9e-fa4e-9f19-3a9707fb35c8 adobe:docid:photoshop:dc84d43f-c3be-2845-9fae-0b21762a06f8 adobe:docid:photoshop:ddf07914-6f25-3549-bde5-73ec854bf0b0 adobe:docid:photoshop:ed29adb4-05aa-084b-a667-eb723adc17d9 adobe:docid:photoshop:fca07037-0425-0248-b419-bf4d04d11508 xmp.did:045b37e8-1b65-0943-b39c-13b99c995ff1 xmp.did:054631e0-9091-4f42-9599-4a5f705faa94 xmp.did:0f67af88-76d5-4c49-bab3-5d6afcbaf3f0 xmp.did:1d8f626e-d659-4b50-9b32-3465f1496181 xmp.did:26370f09-962c-294c-9e99-2bc41538f2d8 xmp.did:4d1ebada-a345-7145-806f-fbf9a663b636 xmp.did:58dbc9e8-d946-8a48-9aa3-cc41159a98c0 xmp.did:70dc05be-6663-fd48-b0e9-779dde1ce9b9 xmp.did:721b9b03-ff7b-4946-b9f1-1b8030c3acc6 xmp.did:7c10341d-9eac-ae42-8a28-c369d35e91dd xmp.did:a778d1c3-feb9-2841-ad7e-9eb96854bbf8 xmp.did:b464e705-b03e-1544-a64d-5bec8762bf86 xmp.did:bdc86107-0268-a345-9029-0a2ccf78c9b0 xmp.did:c1fd78a9-0af1-1f49-9313-67f9e7f50c6c xmp.did:eae88b1d-f379-8d4c-9470-b5232f2c852f xmp.did:f290a017-4608-0246-93e1-4689e96c61d6 Autonomous RF Measurement Assistant with Keysight Frequency Extenders on 200 mm Probe Station SUMMIT200 FormFactor Inc. Perform fully autonomous, hands-free calibrations and measurements of RF and mm-Wave devices over multiple temperatures on 200mm and 300mm probe stations. RF mmW probe station probe system wafer test 150mm probe system 200mm probe system 200mm probe station 300mm probe system 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe system automated probe station automatic probe system automatic probe station semiautomated probe system semiautomated probe station semiautomatic probe system semiautomatic probe station semiconductor wafer probing Electrical probe station measuring equipment wafer prober machine microwave probe station prober electrical tester karl suss SUMMIT200 CM300xi CM300 Elite Elite300 FormFactor Cascade Microtech Contact Intelligence Technology Autonomous semiconductor test AttoGuard PureLine MicroChamber eVue Velox Autonomous rf VueTrack RF Device Test wafer handling wafer level test rf microwave rf measurement Device test Terahertz measurements mmW mmWave mm-Wave milimeterwave measurements milimeterwave test high frequency measurements high frequency test wafer probing temperature measuring device thermal chuck wafer level testing wafer electrical test rf calibration over temperature test unattended test over multiple temperatures wafer prober manufacturers Load pull Focus Microwaves Maury Microwave Keysight Technologies 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 65, 49 194, 206 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 d 0.517058 0.208721 r 0.089560 d 0.505799 0.240541 d 0.478931 0.240541 r 0.089553 d 0.471877 0.206934 r 0.089551 d 0.485293 0.199175 d 0.753998 0.571254 r 0.089533 d 0.734348 0.544205 r 0.089539 d 0.725295 0.519478 r 0.089535 d 0.730965 0.540881 r 0.089524 d 0.743935 0.574131 r 0.089525 d 0.737771 0.606688 r 0.089532 d 0.719577 0.635999 r 0.089538 d 0.700032 0.663345 r 0.089541 d 0.681194 0.691624 r 0.089546 d 0.657736 0.710701 r 0.089554 d 0.643533 0.692585 r 0.089553 d 0.661379 0.663260 r 0.089550 d 0.680663 0.635699 r 0.089547 d 0.698378 0.605876 r 0.089542 d 0.714410 0.574586 r 0.089540 d 0.722997 0.537072 r 0.089527 d 0.744378 0.541188 r 0.089507 d 0.767329 0.559817 d 0.368601 0.659828 r 0.089560 d 0.350969 0.629540 r 0.089557 d 0.330923 0.603205 r 0.089553 d 0.311474 0.575472 r 0.089547 d 0.291210 0.549204 r 0.089535 d 0.267757 0.538051 r 0.089520 d 0.249117 0.561438 r 0.089503 d 0.233108 0.591533 r 0.089515 d 0.251141 0.617662 r 0.089525 d 0.271316 0.643846 r 0.089534 d 0.293137 0.666958 r 0.089538 d 0.312489 0.693987 r 0.089542 d 0.333297 0.717767 r 0.089550 d 0.358184 0.716974 r 0.089556 d 0.358981 0.683603 r 0.089555 d 0.339776 0.655543 r 0.089552 d 0.320294 0.628106 r 0.089547 d 0.299957 0.601924 r 0.089540 d 0.281454 0.573273 r 0.089534 d 0.266798 0.540129 r 0.089525 d 0.251343 0.509547 d 0.603453 0.463223 r 0.090095 d 0.576999 0.471551 r 0.090153 d 0.550546 0.479879 r 0.090183 d 0.525553 0.494786 r 0.090191 d 0.499488 0.505533 r 0.090177 d 0.472845 0.512584 r 0.090142 d 0.446192 0.519331 r 0.090087 d 0.419332 0.523929 r 0.090016 d 0.392339 0.524481 r 0.089925 d 0.365373 0.524459 r 0.089816 d 0.338445 0.524194 r 0.089694 d 0.311570 0.522970 r 0.089557 d 0.284697 0.521670 r 0.089408 d 0.257897 0.520169 r 0.089250 d 0.231341 0.522168 r 0.089347 d 0.247664 0.520155 r 0.089501 d 0.274546 0.520190 r 0.089640 d 0.301427 0.520222 r 0.089769 d 0.328380 0.520251 r 0.089880 d 0.355334 0.520275 r 0.089982 d 0.382345 0.520298 r 0.090058 d 0.409355 0.520314 r 0.090125 d 0.436393 0.520328 r 0.090167 d 0.462659 0.514205 r 0.090190 d 0.487929 0.500137 r 0.090193 d 0.510150 0.477342 r 0.090175 d 0.528853 0.448544 d 0.608058 0.399200 r 0.089884 d 0.633551 0.387754 r 0.089772 d 0.660061 0.381390 r 0.089644 d 0.686230 0.373023 r 0.089508 d 0.713008 0.371665 r 0.089362 d 0.739819 0.371762 r 0.089207 d 0.766581 0.371867 r 0.089044 d 0.793076 0.370594 r 0.088879 d 0.819505 0.373476 Profiles 0, 0 22, 16 40, 35 127, 127 224, 230 240, 246 255, 255 0, 0 255, 255 0, 0 255, 255 0, 0 255, 255 endstream endobj 18 0 obj <>stream Adobed #"#"&&&&&,,,,,,,,,,,,,,,,,,,,,#"&&&&&,,,,,,,,,,,,,,,,,,,,,on"   Y!1A"Qaq#2BR3STbr$%4CcDUds5Et &u'()*6789:FGHIJVWXYZefghijvwxyz}!1QRa"ASb2cq #$%&'()*3456789:BCDEFGHIJTUVWXYZdefghijrstuvwxyz ?DAA@AAA@AAA4A; FY@AAA@BF+# #@                             H  Edh hYH!d@AAA@ .7J>",PE..$cZN m/~ZϹ,/}?d%au"?8dJE/%T] _DbsAI%T] _DbsAI%T] _DbsAI%T] _DbsAE!?*]Z߲H~lOh??*]Z߲Hd6%4Ut. _ }$?d.%4Ut. _ }~UUк,.d&%4E!1/Z.?d&%4CBb_sAU .?d%4CA_sAU .?d%4W~,Kh??֪ˡtX_E /֪ˡtiKh?ևľZ. 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FormFactor Inc. Perform fully autonomous, hands-free calibrations and measurements of RF and mm-Wave devices over multiple temperatures on 200mm and 300mm probe stations. RF mmW probe station probe system wafer test 150mm probe system 200mm probe system 200mm probe station 300mm probe system 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe system automated probe station automatic probe system automatic probe station semiautomated probe system semiautomated probe station semiautomatic probe system semiautomatic probe station semiconductor wafer probing Electrical probe station measuring equipment wafer prober machine microwave probe station prober electrical tester karl suss SUMMIT200 CM300xi CM300 Elite Elite300 FormFactor Cascade Microtech Contact Intelligence Technology Autonomous semiconductor test AttoGuard PureLine MicroChamber eVue Velox Autonomous rf VueTrack RF Device Test wafer handling wafer level test rf microwave rf measurement Device test Terahertz measurements mmW mmWave mm-Wave milimeterwave measurements milimeterwave test high 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Verified integrated Silicon Photonics 200mm and 300mm wafer probing solution for production-proven, optimized optical measurements right after installation. Silicon Photonics wafer probe station 200mm probe station 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe station automatic probe station semiautomated probe station semiautomatic probe station manual probe station wafer probing wafer prober semiconductor wafer probing electrical probe station cascade probe station measuring equipment wafer prober machine electrical tester SUMMIT200 CM300xi Cascade Microtech Contact Intelligence Technology wafer handling wafer level test Device test semiconductor test Device characterization and modeling wafer test wafer probing temperature measuring device thermal chuck wafer level testing wafer electrical test high power test small pad probing over temperature test Autonomous semiconductor test Motor Calibration Z-Displacement Calibration Incident Angle (θy) Calibration Planarity (θx) Calibration Z-Displacement Calibration PZT Calibration 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SUMMIT200 - 200mm probe station for semi- to fully-automated wafer probing. 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CM300xi - 300mm probe station for semi- to fully-automated wafer probing. Precise measurements for ultra-low noise, DC, RF, mmW, THz and Silicon Photonics. wafer test 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe system automated probe station automatic probe system automatic probe station semiautomated probe system semiautomated probe station semiautomatic probe system semiautomatic probe station wafer probing wafer prober semiconductor wafer probing Electrical probe station cascade probe station rf probe station measuring equipment wafer prober machine microwave probe station prober electrical tester karl suss probe station Cascade Microtech Contact Intelligence Contact Intelligence Technology Autonomous test Autonomous semiconductor test MicroVac AttoGuard PureLine MicroChamber eVue Velox Autonomous rf Autonomous DC Autonomous SiPh VueTrack RF Device Test high voltage dc wafer handling wafer level test rf microwave rf measurement ultra low noise measurements 1 over f 1/f Silicon Photonics Device test failure analysis semiconductor test IV measurements CV measurements IV CV measurements Device characterization and modeling MEMS test milimeterwave measurements milimeterwave test high frequency measurements high frequency test wafer test wafer probing temperature measuring device probe station measurement vertical probe card test thermal chuck wafer level testing wafer electrical test rf calibration small pad probing over temperature test unattended test over multiple temperatures endstream endobj 213 0 obj <>stream Adobed             "    g !1A"7Qaru#23BCeqs&'RSUbct $%()*45689:DEFGHIJTVWXYZdfghijvwxyz !1Aa3q "2Bb #$%&'()*456789:CDEFGHIJQRSTUVWXYZcdefghijrstuvwxyz ?jbDR$HE"DR$HE"DR$HE"DR$HE"DA9VbM1e4 WF4[(јÖֹVбsv-7y}(`a  ̗MAM"H}hX8VY-¶AClD2I.)%'qKfO-Jp\[dAmNq8]-(], Y e @<^ uz]CB4#LH[}dq𭒹l}¿Ê> Gi(JH` H% , -_rkvo2ۊu$,ϚCV{cjbDR$HE"DR$HE"DR$HE"DR$HE"DUn3l.Ss ^5S%dv[9л'U2vWa_AHH&B2&o``~.͌cJvMmFnWC0ك0DskUK2)Z8n"-9<=t Xu _@Hd%LÈB)MVR/s U+rb3Z1 a-M2Ӂs4#%LN%ӢYW`KOjyq$<ϟJ鸮EI.hߑ"Y&,mRTqxuu=[wu\Rayogs{bU&D$eȌ5>c\>cX6ȸFyZyxCL{cŁ" jbDR$HE"DR$HE"D!P`8Kcĥ$Zt҉iE7 P$\m$q\Iqǿ ưm6ڴwRRJ ؃h"DH Gs0i XPDN(%N H;gV{b&cPJ@5"l6ʙ$2aIWV=7"57(LʨjIT|VW$=XS0e4t>s錽`K9*if_oOu#.dvi b fVTZY:+%$Ѹ "Wn"p"..3p Y0p(׬e\;$4! ^gRLVai% IVkA6'J9&] խHq]/;EI3 AY3 $@iCeL`f=EL3*sJI\B sZxm>ܘs8ܛ\zчaJ O$ʸ~}I87N3$I&F!!KMO%cX\$ɍn_21>39GK|!Q^ _d]Ep֞@$vcrYABA6b!F Y  e2h/.OnɇCL{cǃ$'JǸZ!:ȤWkjbDR$H ̬ҧ K<'a.;moQsFp?fqYKsEղ[Qws@QR]{ܲ0,RyL× ȰB\U|&iֆRJ n܁ v|aյ.Ii+2t jX P6XJ(s8\U|q B8E"TªS&RaNқ/tkWyM!,1مJE\.!RΠ5m yܨLqfYұ%&wHNޖE0i,HK .MYRP`b ⒞}Zj*뉱Z 5*VpY.y&MJ> nJZljV(i]oAmy']R]U I+fe5.1 iI`@v_ x:V6֙JꔥDIoB6$&[eE=Ƃa=6fdAe϶hW-3GPNGfpYE[}=]c\rf)ZNG5\ŜuNj2V~n,keNÜC tlMxn} 3~Bcӕ m/ 2!&0I@::y1yhb/-1鋤*rB[ &%[ۮ&ԲndnGpLJ $i.}GzZ*FmUƱpSsTrLasŷ\IXmiVR.x}Qm 3yb{<̽\},`"06oi 8΢ϚCV{c,ϚCVzc jbD\ړ V.k ZAk *ʛ^ڮ~%Tiq)'l0lƗ#@`)I8 mAM0:yB 5sVHeSlxqJF:uVw I;D98sXF$̄"e;I0gʬ@ @ zNi \J"T@ $ZVPyܙZ%ZemKB.vM(Ɇq .xdyp^wi$X(<^\8x0ĨQRJ{/K50MKb De/#H > wtH"ɲLIpV1oH@ GH6ۆk)<#`oӸ^ >V .8Jak V& {0"ě qiͩK[H$D `؎5l6jjVp0ZEG:*RՐRA6SRhh \%&*'P ]mDWM}R/MStK|ʆ6I I{ҳ*jd ҂y C2N \m{+L5N^yJNdSgM[.*B;Q 4+eo. 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SUMMIT200 - 200mm probe station for semi- to fully-automated wafer probing. 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CM300xi - 300mm probe station for semi- to fully-automated wafer probing. Precise measurements for ultra-low noise, DC, RF, mmW, THz and Silicon Photonics. wafer test 300mm probe station wafer probe system wafer probe station on-wafer test system eVue Digital Microscope Velox Software wafer measurement system automated probe system automated probe station automatic probe system automatic probe station semiautomated probe system semiautomated probe station semiautomatic probe system semiautomatic probe station wafer probing wafer prober semiconductor wafer probing Electrical probe station cascade probe station rf probe station measuring equipment wafer prober machine microwave probe station prober electrical tester karl suss probe station Cascade Microtech Contact Intelligence Contact Intelligence Technology Autonomous test Autonomous semiconductor test MicroVac AttoGuard PureLine MicroChamber eVue Velox Autonomous rf Autonomous DC Autonomous SiPh VueTrack RF Device Test high voltage dc wafer handling wafer level test rf microwave rf measurement ultra low noise measurements 1 over f 1/f Silicon Photonics Device test failure analysis semiconductor test IV measurements CV measurements IV CV measurements Device characterization and modeling MEMS test milimeterwave measurements milimeterwave test high frequency measurements high frequency test wafer test wafer probing temperature measuring device probe station measurement vertical probe card test thermal chuck wafer level testing wafer electrical test rf calibration small pad probing over temperature test unattended test over multiple temperatures endstream endobj 299 0 obj <>stream Adobed            "   {!1A"2Qa BRVq #$%&'()*3456789:CDEFGHIJSTUWXYZbcdefghijrstuvwxyz!1A"Qa 3q#$%&'()*2456789:BCDEFGHIJRSTUVWXYZbcdefghijrstuvwxyz ?a@!@!@!@8\Wd;-a LVPkt9Ÿmʾ$󩖣HD=BP0Oqpd:(\3hs)ْ `4!B!B!B!Ъa@!@!@!n2uDʔmtr`/149xLSqy͝7&R4) AmLNt鶖1deLF ͢LU50bƋ$]֓H܎ktcP7u";7h(Î͵4MQvDUl%@kcKiڔ>i!eCm *6F*"tR4I3 qh9\RF[1$ h#"tZfrl2)) /JQ͐/iޫz,Yu<ԧҬB5(tWmG*h3IeBLTGj qjG4;rLi]ivaI $ #Q~<&y5u)/z&x #LXȔNp#m)u16n #ZYtqЎ7pS^ZҖjS <ؕH}N)JIpy#^ !++R-pl bjtDO>pKcy G4+)e˰n+BPTyҤo":Զ/^nI"+aRkqIKQPD/k;K4L vy`-RrkbP(T&6LZ,%FUpmزBk ȎZ9%mA!@tG;XڀY,%ii9.3M5 ohA2zԝIצ'g t,$% 2hͬ͆0AlhIJj#"8C8S$3h(a%$VtpؾST X A!AR'B(+"t&QʠMfj'-rB(*[vJ/XR>Qsf4҄$Bm'(@6ڶLtГjf/nF#U&9FUZޝwk찆RiRߐB nKoxvzoRmT0ˮ~]GTHn3W}aJJ[KP9V dj"2o&[!mi'?WDbcI)'Y&%d`%%܃!Vf1a\Lz&Zq} qť)J΄n !m Lodͪj$ܓ''&4B,ܵ S2nʶ#\zsc[a&YeEJZYdsDeQ&ǥLR[Éy(eo% yIТ $5VP&fVL҆b- e@ҎZЧ^-褛)'r!3ZVAI3#G,ȍ,DuE)UGD:ў]MKSBOAlQMA%F>Ke꛵4U!JaH0>\;5hS_~Z[qC2K|k?V1@ysITG<'],*bn$Ύ:Nj9HNK٥SO-CyT H7*6|t"^YĒTS^\B33<%>'1 eKyA)_KFM*rԝ]vTL骉;'xM2䬤hq4:.,@#09إZ.bW%Zf.>ˉ ]ݲ֠.J6͠:њq2$(2͒"Nۛ K6TWg劗R7Z6%髬hēgB-;J14:r y.؄N¶2Sz!/3:͓uXs[cyJ؞ibe3h˳B:B[$6ʎ9آu\h⻌/$eQ J. 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