Engineered for complex devices and high-density layouts, IntelliFusion offers unparalleled testing precision and speed. With up to 120,000 probes and support for clock rates of up to 1GHz, this probe card ensures maximum accuracy while operating within a broad test temperature range of -40°C to 130°C. IntelliFusion is equipped with FormFactor’s proprietary Advanced Tester Resource Enhancement (ATRE), which extends up to x16 shared group signals to maximize resource efficiency. Additionally, with its integrated tester-controlled heater, IntelliFusion enables precise thermal management, optimizing probe to pad placement for consistent results and minimized pad area damage.

IntelliFusion is a comprehensive test solution that ensures lower total cost of test, long-life probing, and outstanding performance for high-density, high-complexity devices. Whether testing mainstream DRAM or advanced HBM core die, IntelliFusion provides a robust, future-proof solution for optimizing your wafer test process.

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The HPD IQ2000 is a superior 4 K solution to meet all your probing needs in an ergonomic, low vibration system. This chip-scale prober addresses problems such as long turnaround times, high noise, and low signal capabilities. FormFactor’s extensive knowledge of probing solutions and cryogenic systems puts us in the best position to help you meet your goals. 

The IQ2000 incorporates a variety of thermal isolation techniques to fully harness the available cooling power to achieve a genuine 4 K system with temperature stability down to 5 mK. 

Mechanical vibration poses a significant challenge in probing applications, potentially leading to sample damage and introducing noise into measurements. Triboelectric noise can further contaminate signals when mechanical vibrations propagate through cables. This system ensures a probe-to-DUT displacement of less than 50 nm RMS. 

Designed with customization in mind, the IQ2000 offers a multitude of configurable ports to facilitate signal transmission to your sample. Each stage plate boasts multiple easily accessible vacuum feedthroughs and numerous light-blocking ports, simplifying the integration of various signal capabilities (DC, RF, FO) as per your requirements. 

The HPD IQ2000 delivers genuine 4 K measurement capabilities across all probing operations within an ultra-low vibration environment. Its robust and dependable nature, coupled with an extensive range of optional features and multiple upgrade paths, ensures its suitability for diverse future needs. 

Applications: Photonic QC, Spin QC, Cryo-CMOS, Scanning Microscopy 

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FormFactor’s HPD IQ2000 is a high throughput chip-scale prober for singulated die testing at 4 K or 2 K. The system’s load-lock design enables thermalization of the device under test from 300 K to 4 K in less than an hour – improving the device throughput by up to 10X compared to conventional chip probers.

By leveraging FormFactor’s long experience in advanced probe card technology, the IQ2000 enables a higher density electrical interface than has ever been possible in chip-scale probers. The increased number of pins on the device enables the test of more structures in a single cooldown.

With the IQ2000 rapid chip-scale prober, quantum hardware developers can quickly obtain data for process development statistics to intelligently iterate on chip designs.

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Comprehensive, Turn-key On-wafer Load-pull Integrated Measurement System (IMS) with Keysight Vector Network Analyzers and Focus Microwaves tuners

FormFactor and solution partners Keysight Technologies and Focus Microwaves applications experts will help you configure a robust, complete solution, including:

• FormFactor probe systems: CM300xi, SUMMIT200, EPS200MMW (others available)
• Manual, semi-automatic and fully automatic probe station options
• FormFactor analytical probes: Infinity, InfinityXT, ACP, |Z| probes, T-Wave, (others available) on manual or motorized positioners
• FormFactor calibration accessories: WinCal, Impedance Standard Substrate for LRRM, Multiline TRL Cal Substrate calibrations (others available)
• FormFactor IceShield insert with full thermal capability from -60°C to +300°C
• FormFactor exclusive RF TopHat with probe window for EMI and light-tight testing
• Keysight vector network analyzers and frequency extenders up to 130GHz: N5290A/91A PNA mm-Wave, N524xB PNA-X, P50xxB Streamline VNA (others available)
• Focus Microwaves premium tuners, ranging from Fundamental, Harmonic, Low-Frequency, Active, & Manual for coaxial and waveguide vector load-pull
• To complete the system: cables, adapters, mounting hardware, etc.

Best-in-Class Tuning Range Performance with Minimized Insertion Loss and Optimized Gamma

The tuners from Focus Microwaves are specifically designed for on-wafer integration, which allows them to be located as close to the wafer as physically possible, without the need for a coupler or a cable. FormFactor’s probes can be directly connected to the test port of the tuner, which minimizes insertion loss and maximizes gamma, allowing a very large cover of tunable impedances over the Smith chart. FormFactor’s IceShield platen insert solution allows for frost-free operations at low temperatures and high relative humidity. Tightly integrated instrumentation from industry leader Keysight completes the system to deliver best possible measurement accuracy and repeatability.

Fastest, Low-Risk, and Most Affordable Path to High Quality Measurements

Pre-validated, turn-key, comprehensive, integrated measurement systems from FormFactor deliver peace of mind and immediate, out-of-the-box productivity for important test applications.

These benefits are provided at no extra cost. IMS solutions from FormFactor include no markups over Keysight and Focus pricing, or integration charges.

Only one on-wafer load-pull system in the world is built upon the foundations of the #1 leader in R&D instrumentation plus the #1 leader in analytical probe systems – the FormFactor IMS-K-Load-Pull.

Applications: On-wafer RF/mmW load-pull

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Cryogenic integrated system with Keysight A-LFNA for 1/f flicker noise, RTN, phase noise, device characterization, and other low-frequency noise measurements from room temperature to 4K.

FormFactor and partner Keysight applications experts will help you configure a robust, complete solution, including:

• FormFactor probe system: IQ3000, PAC200 (others available)
• Manual, semi-automatic and fully automatic probes station options
• FormFactor custom probe cards: Cryogenic Cantilever, or Cryogenic Apollo Vertical Probes (Other probe options available)
• FormFactor wafer automation software: Velox 3 for unattended probing over temperature on small pads
• Full over temperature measurements and automation from 4K to Room Temperature (system dependent)
• Keysight advanced low-frequency noise analyzer (A-LFNA): E4727B
• Keysight automation and modeling software: PathWave WaferPro (WaferPro Express)
• To complete the system: cables, adapters, mounting hardware, etc.

Industry’s Most Productive and Accurate Advanced Low-Frequency Noise Measurement System

On-wafer 1/f noise measurements are a critical component of any characterization and modeling test system. Due to the required sensitivity, such testing can be easily corrupted by interference from outside or inside the test system. Overcoming these challenges requires carefully designed equipment from the industry’s foremost test and probe solution providers, cooperating to provide highly sensitive measurements in an ultra-low spectral noise environment. Tightly integrated instrumentation from industry leader Keysight completes the system to deliver best possible measurement accuracy and repeatability.

Fastest, Safest, and Most Affordable Path to High Quality Measurements

Pre-validated, turn-key, comprehensive, integrated measurement systems from FormFactor deliver peace of mind and immediate, out-of-the-box productivity for important test applications.

These benefits are provided at no extra cost. IMS solutions from FormFactor include no markups over Keysight pricing or integration charges.

The world’s most advanced low-frequency noise measurement system – the FormFactor IMS-K-LFN – is now available for cryogenic applications with the IMS-K-Cryo-LFN.

Applications: Low-Frequency Noise, Cryo CMOS

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FormFactor introduces a cost-effective silicon photonics measurement solution to support fundamental research work for emerging applications. Designed into the system are FormFactor’s years of experience developing automated photonics measurement systems – now tailored to the needs of universities and other entry-level users.

The MPS150-SiPh ensures optical fibers can be precisely aligned to couple light in and out of a device without physical contact. Leveraging its intuitive design, the MPS150-SiPh is the perfect solution for less experienced users to discover photonics and achieve highest accuracy test results.

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Both series of dilution refrigerators enable easy and cost-effective cooling to temperatures between 35 to 10 mK. 

The sample of Wet DR-50/250/500 systems is located in a normal vacuum (HV) space. It can be loaded when the system is warm with the vacuum can open. 

The TL series has been optimized for scanning tunneling microscopy (STM) applications. The sample can be loaded into the ultra-high vacuum (UHV) space from the top of the dilution refrigerator insert when the cryostat is cold. 

Custom wiring is available. 

Both fully automated and manually operated gas handling systems are available. 

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